SYMPOSIA PAPER Published: 01 January 1980
STP38652S

Comparative AES, ESCA, and SIMS Investigation of Oxide Films on Iron-Nickel-Chromium Alloys

Source

Electron spectroscopy for chemical analysis (ESCA), Auger electron spectroscopy (AES), and secondary ion mass spectrometry (SIMS) analyses were conducted on oxide films formed at room temperature on iron-nickel-chromium alloys. Results are given for controlled oxidation of sputter-cleaned surfaces with highly pure oxygen and sequential analysis by the three techniques. Mixed iron-chromium oxide films of approximately 25 Å were formed at 0.67 to 0.93 µPa∙s. ESCA and SIMS results confirm the initial formation of a mixed iron-chromium trivalent oxide ((Fe,Cr)2O3) and suggest that a mixed divalent iron—trivalent chromium oxide (FeCr2O4) is also formed in the oxide film.

Author Information

Conner, GR
Inficon Leybold-Heraeus, Inc., East Syracuse, New York
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Details
Developed by Committee: E42
Pages: 54–65
DOI: 10.1520/STP38652S
ISBN-EB: 978-0-8031-5552-7
ISBN-13: 978-0-8031-0277-4