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Electron spectroscopy for chemical analysis (ESCA), Auger electron spectroscopy (AES), and secondary ion mass spectrometry (SIMS) analyses were conducted on oxide films formed at room temperature on iron-nickel-chromium alloys. Results are given for controlled oxidation of sputter-cleaned surfaces with highly pure oxygen and sequential analysis by the three techniques. Mixed iron-chromium oxide films of approximately 25 Å were formed at 0.67 to 0.93 µPa∙s. ESCA and SIMS results confirm the initial formation of a mixed iron-chromium trivalent oxide ((Fe,Cr)2O3) and suggest that a mixed divalent iron—trivalent chromium oxide (FeCr2O4) is also formed in the oxide film.
surface analysis, Auger electron spectroscopy (AES), X-ray photoelectron spectroscopy (XPS), electron spectroscopy for chemical analysis (ESCA), secondary ion mass spectrometry (SIMS), oxide film analysis, iron-nickel-chromium alloys
Surface analysis applications manager, Inficon Leybold-Heraeus, Inc., East Syracuse, New York