SYMPOSIA PAPER Published: 01 January 1980
STP38649S

Application of Surface Analysis for Electronic Devices

Source

The principles of Auger electron spectroscopy, X-ray photoelectron spectroscopy, ion scattering spectroscopy, and secondary ion mass spectrometry are discussed, and their applications in the processing of electronic devices are illustrated. Electronic device processing is divided into five areas: (1) substrate and substrate processing, (2) deposited films, (3) patterning, (4) interconnection, and (5) compatibility. Examples are given in each area in which surface analysis has been used to great advantage in solving processing problems and improving technology.

Author Information

Holloway, PH
University of Florida, Gainesville, Fla.
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Details
Developed by Committee: E42
Pages: 5–23
DOI: 10.1520/STP38649S
ISBN-EB: 978-0-8031-5552-7
ISBN-13: 978-0-8031-0277-4