SYMPOSIA PAPER Published: 01 January 1971
STP38572S

Solid-State X-ray Detectors for Electron Microprobe Analysis

Source

Semiconducting X-ray detectors with low noise and high resolution have recently become available for the less than 20 keV range which is the region of interest encountered in the examination of X-rays produced in the electron microprobe analyzer. Although their energy resolution is generally less than that of crystal spectrometers, they offer special advantages including simultaneous collection of all detectable X-ray signals, high collection efficiencies, wavelength measurement independent of specimen position, and rapid collection of data in a form compatible with computer processing. Added to an electron microprobe, they provide a method of detecting in several minutes all elements with atomic number greater than sodium and present in quantities as small as a few tenths of a percent. Quantitative analyses are possible provided care is exercised in evaluating background spectra and peak overlap.

Author Information

Lifshin, E
General Electric Co., Schenectady, N. Y.
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Details
Developed by Committee: E04
Pages: 140–153
DOI: 10.1520/STP38572S
ISBN-EB: 978-0-8031-5571-8
ISBN-13: 978-0-8031-0070-1