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The components of the energy dispersion X-ray analysis system are discussed, and the electronic noise of peak broadening due to each is identified. Data on count rates and sensitivity are listed for various elements to enable the prospective user to determine whether the technique is applicable to his specimens. Specific comparison is made between the use of electron beams, radioactive isotopes, and X-ray tubes to excite the characteristic X-ray lines of interest. The ability to distinguish small peaks when Bremsstrahlung (white radiation) is present due to the use of direct electron excitation, or when scattering of incident X-rays or gamma rays occurs is discussed.
dispersing, X-ray analysis, X-ray fluorescence, electron probes, scanning electron microscopy, transmission electron microscopy, electron beams, radioactive isotopes, X-ray tubes, X-ray spectra, electronic noise, semiconductor devices, silicon, field effect transistors
Vice president of research, Nuclear Diodes, Inc., Prairie View, Ill.