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Energy spectrometry utilizing a solid-state detector (silicon) for X-ray elemental analysis is described, and compared with wavelength spectrometry.
Parameters which influence the spectrometers energy resolution, energy detection range, and countrate capabilities are reviewed. Measured performance of a spectrometer (200 eV FWHM resolution for 6.404 keV radiation) is demonstrated for both X-ray and electron specimen excitation.
spectroscopy, spectrometers, X-ray spectrometers, chemical analysis, X-ray spectra, X-ray analysis, electron probes, energy bands, wavelength, X-ray fluorescence, solid state counters, silicon, dispersing
Lecturer, Applied Physics and Information Science, University of California, San Diego, Calif
Chemist, Gulf General Atomic Incorporated, San Diego, Calif