SYMPOSIA PAPER Published: 01 January 1971
STP38566S

X-Ray Energy Spectrometry in the 0.1 to 10 Å Range

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Energy spectrometry utilizing a solid-state detector (silicon) for X-ray elemental analysis is described, and compared with wavelength spectrometry.

Parameters which influence the spectrometers energy resolution, energy detection range, and countrate capabilities are reviewed. Measured performance of a spectrometer (200 eV FWHM resolution for 6.404 keV radiation) is demonstrated for both X-ray and electron specimen excitation.

Author Information

Fitzgerald, R
Applied Physics and Information Science, University of California, San Diego, Calif
Gantzel, P
Gulf General Atomic Incorporated, San Diego, Calif
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Details
Developed by Committee: E04
Pages: 3–35
DOI: 10.1520/STP38566S
ISBN-EB: 978-0-8031-5571-8
ISBN-13: 978-0-8031-0070-1