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The desire and need to observe real structures and finer detail has resulted not only in higher performance electron microscopes but also resulted in a great deal of time and effort spent to design and develop better specimen preparation techniques. Since the first direct examination of thin metal foils in 1949 by Heindenreich[I], 2 many different methods of thin film preparation have evolved. This paper will not deal with transmission image interpretation but is intended as a review of procedures and basic techniques of thin foil preparation collected from literature and includes methods contributed by different laboratories represented on the American Society for Testing and Materials (ASTM) Subcommittee E04.11 on Electron Microscopy and Diffraction. Appendix 3.2 provides a complete bibliography of papers published in ASTM Special Technical Publications pertaining to thin foil preparation and applications of transmission electron microscopy of metals.