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    Simultaneous Determination of the Boron and Phosphorus Content in Silicate Glasses by FT-IR Spectroscopy

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    Fourier transform infrared spectroscopy can be used for the rapid determination of the boron and phosphorus concentrations in borophosphosilicate glass films. A multicomponent matrix algebraic method is used in this procedure. Results of the measurements on a number of BPSG samples are presented and the factors affecting the accuracies of the measurements are discussed.


    FT-IR, borophosphosilicate glass films, silicon

    Author Information:

    Krishnan, K
    Applications Manager of Bio-Rad, Digilab Division, Cambridge, MA

    Committee/Subcommittee: F01.06

    DOI: 10.1520/STP32666S