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Fourier transform infrared spectroscopy can be used for the rapid determination of the boron and phosphorus concentrations in borophosphosilicate glass films. A multicomponent matrix algebraic method is used in this procedure. Results of the measurements on a number of BPSG samples are presented and the factors affecting the accuracies of the measurements are discussed.
FT-IR, borophosphosilicate glass films, silicon
Applications Manager of Bio-Rad, Digilab Division, Cambridge, MA