SYMPOSIA PAPER Published: 01 January 1984
STP32651S

Problems Associated with Submicrometre Contaminant Measurement

Source

Special problems in measuring submicrometre particulate contaminants in liquids are discussed. These include the need for standards and specifications in the pertinent particle size and concentration ranges that can be associated with effects of concern in semiconductor processing. Problems in controlling artifact introduction from sample handling and transport systems are discussed. The need for better understanding of statistical effects on data validity in measurements of clean liquids is pointed out. Operation of present-day particle sizing and counting instruments for submicrometre particles is described with some reference to both capabilities and limitations.

Author Information

Lieberman, A
Price: $25.00
Contact Sales
Related
Reprints and Permissions
Reprints and copyright permissions can be requested through the
Copyright Clearance Center
Details
Developed by Committee: F01
Pages: 172–183
DOI: 10.1520/STP32651S
ISBN-EB: 978-0-8031-4915-1
ISBN-13: 978-0-8031-0403-7