SYMPOSIA PAPER Published: 01 January 1984
STP32650S

Forms of Contamination Affecting Device Processing

Source

Semiconductor devices are known for their sensitivity to particulate contamination during manufacture. This sensitivity is increasing as device features shrink and circuit densities increase. Current VLSI (Very Large Scale Integration) devices are also sensitive to many other forms of contamination besides particles. This paper examines the various forms of contamination and their interactions which affect the yield and performance of VLSI devices.

Author Information

Rapa, AC
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Details
Developed by Committee: F01
Pages: 163–171
DOI: 10.1520/STP32650S
ISBN-EB: 978-0-8031-4915-1
ISBN-13: 978-0-8031-0403-7