SYMPOSIA PAPER Published: 01 January 1989
STP26054S

Electrical Characterization of Electrically Active Surface Contaminants by Epitaxial Encapsulation

Source

Electrically active contaminants have been successfully detected on the surface of substrates using an epitaxial layer for encapsulation. P-type <100> wafers were deliberately contaminated with phosphorus and aluminum. The substrates were then subjected to a modified epitaxial growth cycle to preserve the contaminant on the surface High frequency C-V dopant profiles were performed, and electrically active contaminants were detected.

Author Information

Derheimer, A
Takamizawa, S
Matlock, JH
Mollenkopf, H
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Details
Developed by Committee: F01
Pages: 387–399
DOI: 10.1520/STP26054S
ISBN-EB: 978-0-8031-5107-9
ISBN-13: 978-0-8031-1273-5