SYMPOSIA PAPER Published: 01 January 1989
STP26031S

Epitaxial Silicon Quality Improvement by Automatic Surface Inspection

Source

With increasing demands on epitaxial wafer surface quality, automated inspection is necessary. The results from automatic wafer inspection equipment are ambiguous without careful examination of the detected defects. To facilitate microscopic verification of automatically detected defects, we have designed a system for matching flaw counts to actual defects. Using this system, the epitaxial deposition process has been optimized to reduce surface defects.

Author Information

Ruprecht, DJ
Hellwig, LG
Rossi, JA
Price: $25.00
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Details
Developed by Committee: F01
Pages: 87–95
DOI: 10.1520/STP26031S
ISBN-EB: 978-0-8031-5107-9
ISBN-13: 978-0-8031-1273-5