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The requirements imposed by microelectronics structures on material characterization by spreading resistance profiling (SRP) have made the development of sound calibration procedures for SRP essential. To this end, the Efficient Multilayer Analysis Program, also known as the Berkowitz-Lux technique, has been adapted to incorporate both variable probe radius and barrier resistance models. Since both models are heuristically based, two versions of each method have been tried. Numerical stability and the ability to produce reasonable results are discussed for each version.
spreading resistance, profiling
Chief Scientist, Solid State Measurements Inc., Pittsburgh, PA