You are being redirected because this document is part of your ASTM Compass® subscription.
    This document is part of your ASTM Compass® subscription.

    If you are an ASTM Compass Subscriber and this document is part of your subscription, you can access it for free at ASTM Compass
    STP990

    On the Application of Calibration Data to Spreading Resistance Analysis

    Published: 01 January 1989


      Format Pages Price  
    PDF (160K) 13 $25   ADD TO CART
    Complete Source PDF (6.8M) 467 $60   ADD TO CART

    Cite this document

    X Add email address send
    X
      .RIS For RefWorks, EndNote, ProCite, Reference Manager, Zoteo, and many others.   .DOCX For Microsoft Word


    Abstract

    The requirements imposed by microelectronics structures on material characterization by spreading resistance profiling (SRP) have made the development of sound calibration procedures for SRP essential. To this end, the Efficient Multilayer Analysis Program, also known as the Berkowitz-Lux technique, has been adapted to incorporate both variable probe radius and barrier resistance models. Since both models are heuristically based, two versions of each method have been tried. Numerical stability and the ability to produce reasonable results are discussed for each version.

    Keywords:

    spreading resistance, profiling


    Author Information:

    Berkowitz, HL
    Chief Scientist, Solid State Measurements Inc., Pittsburgh, PA


    Committee/Subcommittee: F01.06

    DOI: 10.1520/STP26030S