You are being redirected because this document is part of your ASTM Compass® subscription.
    This document is part of your ASTM Compass® subscription.

    If you are an ASTM Compass Subscriber and this document is part of your subscription, you can access it for free at ASTM Compass

    Particle and Material Control Automation System for VLSI Manufacturing

    Published: 01 January 1987

      Format Pages Price  
    PDF (156K) 9 $25   ADD TO CART
    Complete Source PDF (9.4M) 699 $70   ADD TO CART

    Cite this document

    X Add email address send
      .RIS For RefWorks, EndNote, ProCite, Reference Manager, Zoteo, and many others.   .DOCX For Microsoft Word


    This paper describes a practical automation system for integrated circuit fabrication combining the SMIF (Standard Mechanical InterFace) concept with a new approach to material control. SMIF implementation is shown to provide a cost effective clean environment and a unique opportunity for information management automation. Each SMIF port acts as a material “gateway”, controlling lot processing via data attached directly to the SMIF pod. Misprocessing is eliminated, particulate contamination is reduced, and productivity is improved.


    Standard Mechanical Interface (SMIF), material control, contamination control, clean room technology, automation

    Author Information:

    Brain, MD
    project manager responsible for material control projects, Asyst Technologies, Inc., Fremont, California

    Committee/Subcommittee: F01.06

    DOI: 10.1520/STP25780S