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    STP960

    Particle and Material Control Automation System for VLSI Manufacturing

    Published: 01 January 1987


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    Abstract

    This paper describes a practical automation system for integrated circuit fabrication combining the SMIF (Standard Mechanical InterFace) concept with a new approach to material control. SMIF implementation is shown to provide a cost effective clean environment and a unique opportunity for information management automation. Each SMIF port acts as a material “gateway”, controlling lot processing via data attached directly to the SMIF pod. Misprocessing is eliminated, particulate contamination is reduced, and productivity is improved.

    Keywords:

    Standard Mechanical Interface (SMIF), material control, contamination control, clean room technology, automation


    Author Information:

    Brain, MD
    project manager responsible for material control projects, Asyst Technologies, Inc., Fremont, California


    Committee/Subcommittee: F01.06

    DOI: 10.1520/STP25780S