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Integrals, over selected electron energies, E, of magnesium, aluminum, and silicon KLL Auger spectra of magnesium, aluminum, silicon, and their oxides have been measured directly using tailored modulation techniques. The ratios of Auger currents, I(E), measured in this way from the metals and their respective oxides have been determined and are compared with the corresponding atomic densities of magnesium, aluminum, and silicon in the metals and their oxides. It has been found that, if the I(E) are measured over only the quasi-elastic KL2,3L2,3 Auger peaks, the ratios obtained agree quite well with the atomic densities, whereas, if the I(E) are measured over larger energy ranges, thereby encompassing peaks due to plasmon losses, the agreement is rather poor. This poor agreement is probably due to the quite different inelastic loss mechanisms that occur for the metals and their oxides.
quantitative analysis, materials, Auger electrons, spectroscopy
Research physicist, Air Force Materials Laboratory, Wright-Patterson Air Force BaseLos Alamos Scientific Laboratory, Los Alamos, OhioN. Mex.
Research scientist, Air Force Materials Laboratory, Wright-Patterson Air Force Base, Ohio
Senior research scientist, Universal Energy Systems, Inc., Dayton, Ohio