You are being redirected because this document is part of your ASTM Compass® subscription.
    This document is part of your ASTM Compass® subscription.

    If you are an ASTM Compass Subscriber and this document is part of your subscription, you can access it for free at ASTM Compass

    Oxide Optical Coatings Prepared by Metal-Organic Vapor Deposition

    Published: 01 January 1988

      Format Pages Price  
    PDF (140K) 8 $25   ADD TO CART
    Complete Source PDF (14M) 652 $88   ADD TO CART

    Cite this document

    X Add email address send
      .RIS For RefWorks, EndNote, ProCite, Reference Manager, Zoteo, and many others.   .DOCX For Microsoft Word


    We prepared films of alumina, zirconia and hafnia by Chemical Vapor Deposition (CVD) for evaluation as high refractive index optical components for high power laser applications. Films with high index of refraction (1.89-1.63) but with rather low single shot laser damage thresholds (4–10 J/cm-2) were prepared by high temperature (400%C) thermal decomposition. Lower temperature deposition with chemical assist improves some optical properties and laser damage thresholds at the expense of a lower index of refraction.


    chemical vapor deposition, alumina, hafnia, zirconia, laser damage

    Author Information:

    Brusasco, R
    Lawrence Livermore National Laboratory University of California, Livermore, California

    Committee/Subcommittee: F01.19

    DOI: 10.1520/STP24438S