SYMPOSIA PAPER Published: 01 January 1991
STP23642S

Laser-Induced Damage of Diamond Films

Source

The laser-induced damage thresholds of diamond films deposited on silicon substrates were investigated. Experiments were performed with both CW and pulsed lasers operating at a wavelength of 10.6 μm. Analytical studies were conducted to determine the thermal and thermomechanical states, as well as the electric field strengths, of the films and the substrates at the damage thresholds in an effort to identify the damage mechanism. The evidence suggests that the diamond films are damaged by stress-induced cracking which occurs when the underlying silicon approaches melt.

Author Information

Read, HE
Merker, M
Gurtman, GA
Wilson, RS
Price: $25.00
Contact Sales
Related
Reprints and Permissions
Reprints and copyright permissions can be requested through the
Copyright Clearance Center
Details
Developed by Committee: F01
Pages: 345–359
DOI: 10.1520/STP23642S
ISBN-EB: 978-0-8031-5179-6
ISBN-13: 978-0-8194-0532-6