SYMPOSIA PAPER Published: 01 January 1991
STP23641S

Highly Damage-Resistant Reflectors for 248 nm Formed by Fluorides Multilayers

Source

We investigated the laser damage thresholds and optical performances of fluorides multilayered reflectors, consisting of middle index fluoride and Na3AlF6 for high power KrF laser applications. It was found the damage thresholds of those reflectors are significantly improved by laser annealing. Those reflectors with annealing resisted against the fluence of 18 – 27 J/cm2 (This fluence varies on combinations of various fluorides) for 248 nm, 15 nsec, 10 Hz pulses.

Author Information

Izawa, T
Yamamura, N
Uchimura, R
Hashimoto, I
Yakuoh, T
Owadano, Y
Matsumoto, Y
Yano, M
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Details
Developed by Committee: F01
Pages: 339–344
DOI: 10.1520/STP23641S
ISBN-EB: 978-0-8031-5179-6
ISBN-13: 978-0-8194-0532-6