SYMPOSIA PAPER Published: 01 January 1986
STP23106S

Leed Analysis of Pulsed Laser Damage to Mo(100) Surfaces

Source

Low Energy Electron Diffraction (LEED) and Auger Electron Spectroscopy (AES) have been used to investigate the effect of Q-switched, frequency doubled Nd:YAG laser pulses on the surface structure and composition of Mo(100). The experiments were conducted in a special ultra-high vacuum (UHV) chamber which allowed the characterized surfaces to be irradiated in an UHV environment. Good epitaxial regrowth of the Mo(100) surface was observed after laser surface melting as evidenced by LEED. Changes in the spot profiles and their dependence on incident electron energy after irradiation suggest the incorporation of defects and the formation of random islands on the surface. The study included laser fluences both above and below the melt threshold of the surface. Additionally, the annealing action of laser pulses on surfaces that had been heavily damaged by Ar+ ion bombardment was investigated.

Author Information

Helms, AL
Cho, C-C
Bernasek, SL
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Details
Developed by Committee: F01
Pages: 59–65
DOI: 10.1520/STP23106S
ISBN-EB: 978-0-8031-4997-7
ISBN-13: 978-0-8031-0960-5