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    Emergency Spill Control in Semiconductor Manufacture

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    State-of-the art technologies in the semiconductor industry require the use of exotic processing techniques using unusual and hazardous chemicals. The objective of this paper is to provide a safe procedure for clean-up and disposal of emergency dry and liquid chemical spills as they relate to manufacturing shop operations. It will give detailed information on correct and proper procedures and list all the personal protective equipment required, i.e. gloves, protective sleeves, Tyvek suits, respirators, self-contained breathing apparatus. A 21-minute video tape was produced by AT&T for use in training employees in the event of emergency spill clean up.


    Hazardous chemicals, emergency spill control, spill control teams, spill control carts and supplies, spirometry, neutralizing solutions, contained spills, non-contained spills

    Author Information:

    Hilbert, AC
    safety specialist, AT&T, Reading, Pennsylvania

    Committee/Subcommittee: F23.30

    DOI: 10.1520/STP22941S