You are being redirected because this document is part of your ASTM Compass® subscription.
    This document is part of your ASTM Compass® subscription.

    STP1015

    Effect of Molecular Fluorine on the Performance of Excimer Laser Optics

    Published: 0


      Format Pages Price  
    PDF (16K) 1 $25   ADD TO CART
    Complete Source PDF (14M) 581 $77   ADD TO CART

    Abstract

    Keywords:

    Excimer lasers, fluorine degradation, laser damage, ultraviolet laser coatings


    Author Information:

    Foltyn, SR
    Los Alamos National Laboratory,

    Jolin, LJ
    Los Alamos National Laboratory,

    Lindholm, G
    Los Alamos National Laboratory,


    Committee/Subcommittee: F01.11

    DOI: 10.1520/STP18779S