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Using an oblique geometry, we have previously demostrated that Raman spectroscopy be used to characterize submicron-thick optical films. With this technique, we have discovered and studied amorphous-crystalline and anatase-rutile transformations in various types of titania films. These studies were however done with treatment and diagnostics carried out in a sequential manner. One objective of this paper is therefore to establish the feasibility of using in-situ Raman spectroscopy to monitor the process of crystallization and structural transformation of optical thin-films in real time. A second objective is to demonstrate that Raman spectroscopy can be used to detect microscopic differences existed in amorphous thin films. We show that the microscopic differences in three otherwise similar types of amorphous titania films may be correlated with their obvious structural differences upon thermal annealing.
Raman spectroscopy, optical coatings, TiO, 2, amorphous types, in-situ study, structural transformation
Colorado State University, Fort Collins, Colorado
Control Laser Corp., Orlando, FL