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    Raman Microprobe of Laser-Induced Surface Damage Regions in TiO2 and ZrO2 Coatings

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    The anatase-to-rutile phase transition, which attends pulsed laser-induced damage of anatase TiO2 thin films, is studied by simultaneous microphotography and Raman microprobe. The damage is distributed across the damage area in regions of distinct morphology and spectra. In multilayer coatings, a mechanical surface-fracture zone surrounds a set of thin, layered flat rings of distinct but irregular boundaries. These rings surround a rough, pitted transparent central crater in the quartz substrate. Raman difference spectroscopy is used to reveal damage regions containing the rutile phase and regions devoid of TiO2. Similarly, Raman microprobe spectra reveal the monoclinic crystalline form of ZrO2 in damaged regions of amorphous ZrO2 coatings. Finally, frequency shifts of the anatase v6 line (nominally 143 cm-1) are used to identify stress in laser-pulse irradiated anatse coatings.


    laser damage, microprobe, Raman spectroscopy, TiO, 2, optical coatings, ZrO, 2, optical coatings

    Author Information:

    Friedrich, DM
    Pacific Northwest Laboratory, Richland, Washington

    Exarhos, GJ
    Pacific Northwest Laboratory, Richland, Washington

    Committee/Subcommittee: E13.08

    DOI: 10.1520/STP18773S