Author Information

Tom Abraham

Affiliation: Northern Telecom Limited

Division/Department: IC Development

Address:
Station C
P.O. Box 3511
Ottawa, Ontario K1Y 4H7
Canada


Publications


Profile Control of Plasma Etched Polysilicon Using Implant Doping

STP25752S
Tom Abraham
Northern Telecom Ltd.


StockCodeTitlePublished AsAffiliationPub Date by Most Viewed
STP25752S Profile Control of Plasma Etched Polysilicon Using Implant Doping Tom Abraham Northern Telecom Ltd. 01 January 1987