Author Information

S. M. Allameh

Affiliation: Princeton University

Address:
Olden Street
Princeton, New Jersey 8544
United States


Publications


Surface Topology and Fatigue in Si MEMS Structures

STP10976S
S. M. Allameh
Princeton University


StockCodeTitlePublished AsAffiliationPub Date by Most Viewed
STP10976S Surface Topology and Fatigue in Si MEMS Structures S. M. Allameh Princeton University 01 January 2001