Author Information

Margareth C. Arst

Affiliation: CQ and R at Signetics

Division/Department: Fab Process Materials Engineering

Address:
811 E. Arques Avenue
Sunnyvale, California 94086
United States


Publications


Identifying Gettered Impurities in Silicon by LIMA Analysis

STP25769S
Margareth C. Arst
CQ and R at Signetics


StockCodeTitlePublished AsAffiliationPub Date by Most Viewed
STP25769S Identifying Gettered Impurities in Silicon by LIMA Analysis Margareth C. Arst CQ and R at Signetics 01 January 1987