Author Information

J. R. Abernathey

Affiliation: IBM General Technology Division

Essex Junction, Virginia 5452
United States


StockCodeTitlePublished AsAffiliationPub Date by Most Viewed
STP25750S The Bonding Structure and Compositional Analysis of Plasma Enhanced and Low Pressure Chemical Vapor Deposited Silicon Dielectric Films J. R. Abernathey IBM General Technology Division 01 January 1987