Standard Historical Last Updated: Nov 04, 2015 Track Document
ASTM F24-09

Standard Method for Measuring and Counting Particulate Contamination on Surfaces

Standard Method for Measuring and Counting Particulate Contamination on Surfaces F0024-09 ASTM|F0024-09|en-US Standard Method for Measuring and Counting Particulate Contamination on Surfaces Standard new BOS Vol. 15.03 Committee E21
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Abstract

This test method establishes the standard procedures for measuring and quantizing the size distribution of particulate contamination either on, or washed from, the surface of small electron-device components. The apparatus and reagents required for this test are also enumerated herein. The number of required test specimens is governed by the dimensions of the component or surface being analyzed. Results shall be interpreted as particles per component or particles per square centimetre of component surface.

Scope

1.1 This test method covers the size distribution analysis of particulate contamination, 5 μm or greater in size, either on, or washed from, the surface of small electron-device components. A maximum variation of two to one (±33 % of the average of two runs) should be expected for replicate counts on the same sample.

1.2 The values stated in SI units are to be regarded as standard. No other units of measurement are included in this standard.

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Details
Book of Standards Volume: 15.03
Developed by Subcommittee: E21.05
Pages: 4
DOI: 10.1520/F0024-09
ICS Code: 17.040.20