View Historical Standards for F1238:
Click any Designation link to view a Document Summary Description.
Document Designation and Title
Year
Select
Item(s)
F1238 Standard Specification for Refractory Silicide Sputtering Targets for Microelectronic Applications
95(2003)
F1238 Standard Specification for Refractory Silicide Sputtering Targets for Microelectronic Applications
95(1999)
