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This test method applies to hermetic package leak testing to detect leaks of a broad spectrum in size with a minimum detection level equal to the sensitivity of the helium mass spectrometer equipment used in the test.
Formerly under the jurisdiction of Committee F01 on Electronics and Subcommittee F01.03 on Metallic Materials, this practice was withdrawn in May 2009 with no replacement because the committee is not aware of the need to maintain the standard. Reference to the standard will remain available, but at this time, the committee does not wish to actively maintain the standard.
1.1 This test method applies to hermetic package leak testing to detect leaks of a broad spectrum in size with a minimum detection level equal to the sensitivity of the helium mass spectrometer equipment used in the test.
1.2 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use.
2. Referenced Documents (purchase separately) The documents listed below are referenced within the subject standard but are not provided as part of the standard.
E691 Practice for Conducting an Interlaboratory Study to Determine the Precision of a Test Method
F78 Test Method for Calibration of Helium Leak Detectors by Use of Secondary Standards
F98 Practices for Determining Hermeticity of Electron Devices by a Bubble Test
F134 Test Methods for Determining Hermeticity of Electron Devices with a Helium Mass Spectrometer Leak Detector
Federal StandardFederal Standard209B Clean Room and Work Station Requirements, Controlled Environment
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ASTM F816-83(2003), Standard Test Method for Combined Fine and Gross Leaks for Large Hybrid Microcircuit Packages (Withdrawn 2009), ASTM International, West Conshohocken, PA, 1998, www.astm.orgBack to Top