This test method covers the apparatus required, sampling methods, standard procedures and calculations, and test reports for counting and sizing airborne microparticulate matter, the sampling areas for which are specifically those with contamination levels typical of cleanrooms and dust-controlled areas. The test method is based on the microscopical examination of particles impinged upon a membrane filter with the aid of a vacuum. Sampling may be done in a cleanroom, clean zone, or other controlle areas, or in a duct or pipe, wherein the number of sampling points is proportional to the floor area of the enclosure to be checked. The apparatus and facilities required are typical of a laboratory for the study of macroparticle contamination. The operator must have adequate basic training in microscopy and the techniques of particle sizing and counting.
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1.1 This test method covers counting and sizing airborne particulate matter 5 µm and larger (macroparticles). The sampling areas are specifically those with contamination levels typical of cleanrooms and dust-controlled areas.
1.2 The values stated in either SI units or inch-pound units are to be regarded separately as standard. The values stated in each system may not be exact equivalents; therefore, each system shall be used independently of the other. Combining values from the two systems may result in non-conformance with the standard.
1.3 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory requirements prior to use.
2. Referenced Documents (purchase separately) The documents listed below are referenced within the subject standard but are not provided as part of the standard.
IEST-G-CC1003 Measurement of Airborne Macroparticles (1999) Available from Institute of Environmental Sciences and Technology (IEST), Arlington Place One, 2340 S. Arlington Heights Rd., Suite 100, Arlington Heights, IL 60005-4516, http://www.iest.org.
SAE Abstract ARP-743, Procedure for the Determination of Particulate Contamination of Air in Dust-Controlled Spaces by Particle Count Method, August 1962 Available from Society of Automotive Engineers (SAE), 400 Commonwealth Dr., Warrendale, PA 15096-0001, http://www.sae.org.
F50 Practice for Continuous Sizing and Counting of Airborne Particles in Dust-Controlled Areas and Clean Rooms Using Instruments Capable of Detecting Single Sub-Micrometre and Larger Particles
ISO14644-1 Cleanrooms and Associated Controlled Environments--Part 1: Classification of Air Cleanliness Available from American National Standards Institute (ANSI), 25 W. 43rd St., 4th Floor, New York, NY 10036, http://www.ansi.org.
airborne particle concentration; cleanroom; contamination; macroparticle; Dust-controlled areas; Electron tubes; Microscopic examination--electronic materials; Particulate contamination (aerospace environments); Semiconductor clean rooms;
ICS Number Code 13.040.30 (Workplace atmospheres)
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