Active Standard ASTM F24 | Developed by Subcommittee: E21.05
Book of Standards Volume: 15.03
Historical (view previous versions of standard)
This test method establishes the standard procedures for measuring and quantizing the size distribution of particulate contamination either on, or washed from, the surface of small electron-device components. The apparatus and reagents required for this test are also enumerated herein. The number of required test specimens is governed by the dimensions of the component or surface being analyzed. Results shall be interpreted as particles per component or particles per square centimetre of component surface.
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1.1 This test method covers the size distribution analysis of particulate contamination, 5 μm or greater in size, either on, or washed from, the surface of small electron-device components. A maximum variation of two to one (±33 % of the average of two runs) should be expected for replicate counts on the same sample.
1.2 The values stated in SI units are to be regarded as standard. No other units of measurement are included in this standard.
ICS Number Code 17.040.20 (Properties of surfaces)