Abstract
This specification covers pure aluminum metal (unalloyed) for use as source material for vacuum coating applications. Aluminum metal shall conform to the following requirements: purity grade levels, grain size, dimensions, maximum impurity level, workmanship, finish, appearance, sampling, and packaging. Impurity analysis shall be performed using optical emission spectroscopy and atomic absorption.
This abstract is a brief summary of the referenced standard. It is informational only and not an official part of the standard; the full text of the standard itself must be referred to for its use and application. ASTM does not give any warranty express or implied or make any representation that the contents of this abstract are accurate, complete or up to date.
1. Scope
1.1 This specification covers pure aluminum metal (unalloyed) for use as raw material for making evaporation sources, sputtering targets, and superconducting wires.
1.2 This specification sets purity grade levels, physical attributes, analytical methods, and packaging requirements.
2. Referenced Documents (purchase separately)
The documents listed below are referenced within the subject standard but are not provided as part of the standard.
ASTM Standards
E29 Practice for Using Significant Digits in Test Data to Determine Conformance with Specifications
E112 Test Methods for Determining Average Grain Size
Keywords
aluminum source; evaporation; thin films; vacuum coating; Aluminum--specifications; Aluminum electrical conductors (semiconductors); Aluminum source; Electronic materials/applications--specifications; Electronic thin-film applications--specifications; Evaporators/evaporation--specifications; Sputtering process/targets--specifications; Superconducting wires; Vacuum coating applications;
ICS Code
ICS Number Code 25.220.40 (Metallic coatings)
DOI: 10.1520/F1594-95R11
ASTM International is a member of CrossRef.
Citing ASTM Standards
[Back to Top]