This specification covers pure aluminum metal (unalloyed) for use as source material for vacuum coating applications. Aluminum metal shall conform to the following requirements: purity grade levels, grain size, dimensions, maximum impurity level, workmanship, finish, appearance, sampling, and packaging. Impurity analysis shall be performed using optical emission spectroscopy and atomic absorption.
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1.1 This specification covers pure aluminum metal (unalloyed) for use as raw material for making evaporation sources, sputtering targets, and superconducting wires.
1.2 This specification sets purity grade levels, physical attributes, analytical methods, and packaging requirements.
2. Referenced Documents (purchase separately) The documents listed below are referenced within the subject standard but are not provided as part of the standard.
E29 Practice for Using Significant Digits in Test Data to Determine Conformance with Specifications
E112 Test Methods for Determining Average Grain Size
aluminum source; evaporation; thin films; vacuum coating; Aluminum--specifications; Aluminum electrical conductors (semiconductors); Aluminum source; Electronic materials/applications--specifications; Electronic thin-film applications--specifications; Evaporators/evaporation--specifications; Sputtering process/targets--specifications; Superconducting wires; Vacuum coating applications;
ICS Number Code 25.220.40 (Metallic coatings)
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