Significance and Use
4.1 This guide defines a procedure for testing components being considered for installation into a high-purity gas distribution system. Application of this guide is expected to yield comparable data among components tested for purposes of qualification for this installation.
4.2 This guide establishes a procedure for determining the elemental composition and metallurgical characteristics of metal used to fabricate components for high purity gas distribution systems in the semiconductor industry. The composition and metallurgy of stainless steel may be expected to affect properties of importance to this application, including surface roughness, incidence of surface defects, passivation, corrosion resistance, and welding.
1.1 This guide covers corrosion resistant metallic alloys of the general class stainless steel, containing chromium, nickel, manganese, and silicon as major alloying additions and possibly molybdenum, that are qualified or specified for the materials of components used in high-purity gas supply systems for the semiconductor industry. This guide is primarily intended for testing to determine conformance to applicable composition and metallurgical specifications as stated in supplier product specifications or customer purchase specifications, or both.
1.2 Elements analyzed and reported in this guide are as follows:
1.2.1 The alloying additions chromium, nickel, and molybdenum (if specified in alloy, as in type 316L),
1.2.2 The minor elements and residuals manganese, silicon, copper, cobalt, and stabilizers such as titanium and columbium (niobium), if present,
1.2.3 Carbon, sulfur and phosphorus,
1.2.4 Nitrogen and oxygen gases,
1.2.5 Any additional minor element additions that may be made as part of the melting and casting practice, such as aluminum and calcium,
1.2.6 Available standard analytical and reporting techniques are described for these elements.
1.3 Metallurgical characteristics to be analyzed and reported are inclusion contents, grain structure, mechanical properties, and intergranular corrosion susceptibility.
1.4.1 This guide is limited to corrosion resistant metal alloys of the general class stated in the Scope.
1.4.2 The test methods cited in this guide are not intended to preclude the use of other generally accepted techniques of demonstrated equivalent or superior precision and bias.
1.4.3 Inclusion of testing and analysis procedures for any given element or metallurgical characteristic in this guide is not to be construed as being a requirement for incorporation of that element or metallurgical characteristic into any specifications.
1.5 The values stated in SI units are to be regarded as the standard. The inch-pound units given in parentheses are for information only.
1.6 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use.
2. Referenced Documents (purchase separately) The documents listed below are referenced within the subject standard but are not provided as part of the standard.
A262 Practices for Detecting Susceptibility to Intergranular Attack in Austenitic Stainless Steels
A370 Test Methods and Definitions for Mechanical Testing of Steel Products
A479/A479M Specification for Stainless Steel Bars and Shapes for Use in Boilers and Other Pressure Vessels
A484/A484M Specification for General Requirements for Stainless Steel Bars, Billets, and Forgings
A751 Test Methods, Practices, and Terminology for Chemical Analysis of Steel Products
E8 Test Methods for Tension Testing of Metallic Materials
E45 Test Methods for Determining the Inclusion Content of Steel
E112 Test Methods for Determining Average Grain Size
E353 Test Methods for Chemical Analysis of Stainless, Heat-Resisting, Maraging, and Other Similar Chromium-Nickel-Iron Alloys
E572 Test Method for Analysis of Stainless and Alloy Steels by X-ray Fluorescence Spectrometry
E1019 Test Methods for Determination of Carbon, Sulfur, Nitrogen, and Oxygen in Steel, Iron, Nickel, and Cobalt Alloys by Various Combustion and Fusion Techniques
E1086 Test Method for Atomic Emission Vacuum Spectrometric Analysis of Stainless Steel by Point-to-Plane Excitation Technique
E1122 Practice for Obtaining JK Inclusion Ratings Using Automatic Image Analysis
E1245 Practice for Determining the Inclusion or Second-Phase Constituent Content of Metals by Automatic Image Analysis
E1282 Guide for Specifying the Chemical Compositions and Selecting Sampling Practices and Quantitative Analysis Methods for Metals, Ores, and Related Materials
E1382 Test Methods for Determining Average Grain Size Using Semiautomatic and Automatic Image Analysis
alloy composition; components; composition; contamination; corrosion; gas distribution components; metallurgical analysis; metals; semiconductor processing; stainless steel;
ICS Number Code 77.040.01 (Testing of metals in general); 91.140.65 (Water heating equipment)
ASTM International is a member of CrossRef.
Citing ASTM Standards
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