Significance and Use
4.1 The purpose of this test method is to define a procedure for testing components being considered for installation into a high-purity gas distribution system. Application of this test method is expected to yield comparable data among components tested for purposes of qualification for this installation.
1. Scope
1.1 This test method establishes a procedure for comparing the elemental composition of normal surfaces with any defects found on the surfaces of metal tubing, fittings, valves, or any metal component.
1.2 This test method applies to all steel surfaces of components such as tubings, connectors, regulators, and valves, regardless of size, style, or type.
1.3 Limitations:
1.3.1 This test method is intended for use by scanning electron microscope/energy dispersive x-ray spectrometer (SEM/EDX) operators with skill level typically achieved over a twelve-month period.
1.3.2 SEM used for this study should conform to those limitations outlined in Test Method F1372 and should have a minimum point-to-point resolution of 30 nm.
1.4 The values stated in SI units are to be regarded as the standard. The inch-pound units given in parentheses are for information only.
1.5 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use. Specific hazard statements are given in Section 6.
2. Referenced Documents (purchase separately) 
The documents listed below are referenced within the subject standard but are not provided as part of the standard.
ASTM Standards
F1372 Test Method for Scanning Electron Microscope (SEM) Analysis of Metallic Surface Condition for Gas Distribution System Components
Keywords
components; connectors; contamination; EDX; gas distribution components; SEM/EDX; semiconductor processing; surface condition; tubing;
ICS Code
ICS Number Code 17.040.20 (Properties of surfaces)
DOI: 10.1520/F1375-92R12
ASTM International is a member of CrossRef.
Citing ASTM Standards
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