ASTM E984 - 12

    Standard Guide for Identifying Chemical Effects and Matrix Effects in Auger Electron Spectroscopy

    Active Standard ASTM E984 | Developed by Subcommittee: E42.03

    Book of Standards Volume: 03.06


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    Significance and Use

    4.1 Auger electron spectroscopy is often capable of yielding information concerning the chemical and physical environment of atoms in the near-surface region of a solid as well as giving elemental and quantitative information. This information is manifested as changes in the observed Auger electron spectrum for a particular element in the specimen under study compared to the Auger spectrum produced by the same element when it is in some reference form. The differences in the two spectra are said to be due to a chemical effect or a matrix effect. Despite sometimes making elemental identification and quantitative measurements more difficult, these effects in the Auger spectrum are considered valuable tools for characterizing the environment of the near-surface atoms in a solid.

    1. Scope

    1.1 This guide outlines the types of chemical effects and matrix effects which are observed in Auger electron spectroscopy.

    1.2 Guidelines are given for the reporting of chemical and matrix effects in Auger spectra.

    1.3 Guidelines are given for utilizing Auger chemical effects for identification or characterization.

    1.4 This guide is applicable to both electron excited and X-ray excited Auger electron spectroscopy.

    1.5 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use.


    2. Referenced Documents (purchase separately) The documents listed below are referenced within the subject standard but are not provided as part of the standard.

    ASTM Standards

    E673 Terminology Relating to Surface Analysis

    E827 Practice for Identifying Elements by the Peaks in Auger Electron Spectroscopy

    E983 Guide for Minimizing Unwanted Electron Beam Effects in Auger Electron Spectroscopy

    E996 Practice for Reporting Data in Auger Electron Spectroscopy and X-ray Photoelectron Spectroscopy

    Other Documents

    ISO18118:2004 Surface Chemical Analysis--Auger Electron Spectroscopy and X-ray Photoelectron Spectroscopy--Guide to the Use of Experimentally Determined Relative Sensitivity Factors for the Quantitative Analysis of Homogenous Materials


    ICS Code

    ICS Number Code 71.040.50 (Physicochemical methods of analysis)

    UNSPSC Code

    UNSPSC Code


    DOI: 10.1520/E0984-12

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