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Significance and Use
4.1 Auger electron spectroscopy is often capable of yielding information concerning the chemical and physical environment of atoms in the near-surface region of a solid as well as giving elemental and quantitative information. This information is manifested as changes in the observed Auger electron spectrum for a particular element in the specimen under study compared to the Auger spectrum produced by the same element when it is in some reference form. The differences in the two spectra are said to be due to a chemical effect or a matrix effect. Despite sometimes making elemental identification and quantitative measurements more difficult, these effects in the Auger spectrum are considered valuable tools for characterizing the environment of the near-surface atoms in a solid.
2. Referenced Documents (purchase separately) The documents listed below are referenced within the subject standard but are not provided as part of the standard.
E673 Terminology Relating to Surface Analysis
E827 Practice for Identifying Elements by the Peaks in Auger Electron Spectroscopy
E983 Guide for Minimizing Unwanted Electron Beam Effects in Auger Electron Spectroscopy
E996 Practice for Reporting Data in Auger Electron Spectroscopy and X-ray Photoelectron Spectroscopy
Other DocumentsISO18118:2004 Surface Chemical Analysis--Auger Electron Spectroscopy and X-ray Photoelectron Spectroscopy--Guide to the Use of Experimentally Determined Relative Sensitivity Factors for the Quantitative Analysis of Homogenous Materials
ICS Number Code 71.040.50 (Physicochemical methods of analysis)