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DESIG: E902 05 ^RATIONALE:
This practice covers a procedure for checking some of the operating characteristics of an X-ray photoelectron spectrometer.
Formerly under the jurisdiction of Committee E42 on Auger Electron Spectroscopy and X-Ray Photoelectron Spectroscopy, this practice was withdrawn without replacement in November 2011 due to its limited use by the industry.
1.1 This practice covers a procedure for checking some of the operating characteristics of an X-ray photoelectron spectrometer. Tests herein provide checks of the repeatability of intensity measurements and the drift of the intensities with time. This practice may be conducted at the same time as the spectrometer energy calibration using Practice E 2108.
1.2 LimitationsThis practice is meant to augment, and not to replace, the calibration procedures recommended by the manufacturer of the spectrometer. This practice is also not meant to be used as a means of comparison between X-ray photoelectron spectrometers, but only as a self-consistent check of the operating characteristics of an individual spectrometer.
1.3 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use.
2. Referenced Documents (purchase separately) The documents listed below are referenced within the subject standard but are not provided as part of the standard.
E673 Terminology Relating to Surface Analysis
E996 Practice for Reporting Data in Auger Electron Spectroscopy and X-ray Photoelectron Spectroscopy
E1078 Guide for Specimen Preparation and Mounting in Surface Analysis
E2108 Practice for Calibration of the Electron Binding-Energy Scale of an X-Ray Photoelectron Spectrometer
ISO StandardsISO24237 Surface Chemical Analysis-- X-ray Photoelectron Spectroscopy - Repeatability and Constancy of Intensity Scale