1.1 This standard specifies the dimensions of knife-edge style flanges and their associated gaskets used in vacuum systems for pressures ranging from 105 Pa to 10-11 Pa. Such flanges are widely used throughout vacuum technology applications in semiconductor processing tools, surface analysis systems, space simulation systems, and general research requiring vacuum.
1.2 The values stated in either SI units or inch-pound units are to be regarded separately as standard. The values stated in each system may not be exact equivalents; therefore, each system shall be used independently of the other. Combining values from the two systems may result in non-conformance with the standard.
1.3 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use.
2. Referenced Documents (purchase separately) The documents listed below are referenced within the subject standard but are not provided as part of the standard.
E673 Terminology Relating to Surface Analysis
ISO 4288:1996 Geometrical Product Specifications (GPS)--Surface Texture: Profile Method--Rules and Procedures for the Assessment of Surface Texture
flange; rotatable flange; vacuum seal; gasket; knife-edge; vacuum hardware; metal seal; vacuum fitting; metal gasket; outgassing;
ICS Number Code 23.160 (Vacuum technology)
ASTM International is a member of CrossRef.
Citing ASTM Standards
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