ASTM E2695 - 09

    Standard Guide for Interpretation of Mass Spectral Data Acquired with Time-of-Flight Secondary Ion Mass Spectroscopy

    Active Standard ASTM E2695 | Developed by Subcommittee: E42.06

    Book of Standards Volume: 03.06


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    Significance and Use

    Interpretation of static SIMS mass spectral data can be complicated due to the complexity and density of data obtained and therefore, variability often occurs when users are not consistent in their methods of data interpretation This guide is intended to help avoid these inconsistencies, by discussing the most commonly observed scenarios in static SIMS analysis and how to approach these scenarios.

    This guide can be used as a training guide for employees or students, or both.

    1. Scope

    1.1 This guide provides time-of-flight secondary ion mass spectrometry (ToF-SIMS) users with a method for forms of interpretation of mass spectral data. This guide is applicable to most ToF-SIMS instruments and may or may not be applicable to other forms of secondary icon mass spectrometry (SIMS).

    1.2 This guide does not purport to address methods of sample preparation. It is the responsibility of the user to adhere to strict sample preparation procedures in order to minimize contamination and optimize signals. See Guide E1078 and ISO 18116 for sample preparation guidelines.

    1.3 The values stated in SI units are to be regarded as standard. No other units of measurement are included in this standard.

    1.4 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use.


    2. Referenced Documents (purchase separately) The documents listed below are referenced within the subject standard but are not provided as part of the standard.

    ASTM Standards

    E673 Terminology Relating to Surface Analysis

    E1078 Guide for Specimen Preparation and Mounting in Surface Analysis

    E1504 Practice for Reporting Mass Spectral Data in Secondary Ion Mass Spectrometry (SIMS)

    E1635 Practice for Reporting Imaging Data in Secondary Ion Mass Spectrometry (SIMS)

    ISO Standards

    ISO18116 Guidelines for Preparation and Mounting of Specimens for Analysis


    ICS Code

    ICS Number Code 71.040.50 (Physicochemical methods of analysis)

    UNSPSC Code

    UNSPSC Code


    Referencing This Standard

    DOI: 10.1520/E2695-09

    ASTM International is a member of CrossRef.

    Citation Format

    ASTM E2695-09, Standard Guide for Interpretation of Mass Spectral Data Acquired with Time-of-Flight Secondary Ion Mass Spectroscopy, ASTM International, West Conshohocken, PA, 2009, www.astm.org

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