This practice is to be used for reporting the experimental and data reduction procedures to be described with the publication of the data.

1. Scope

1.1 This practice lists the minimum information necessary to describe the instrumental, experimental, and data reduction procedures used in acquiring and reporting images generated by secondary ion mass spectrometry (SIMS).

1.2 The values stated in SI units are to be regarded as standard. No other units of measurement are included in this standard.

1.3 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use.

2. Referenced Documents (purchase separately) The documents listed below are referenced within the subject standard but are not provided as part of the standard.

ASTM Standards

E673 Terminology Relating to Surface Analysis

E1504 Practice for Reporting Mass Spectral Data in Secondary Ion Mass Spectrometry (SIMS)

Keywords

imaging; secondary ion mass spectrometry ; Image analysis; Reporting data; SIMS (secondary ion mass spectrometry)

ICS Code

ICS Number Code 71.040.50 (Physicochemical methods of analysis)

Citing ASTM Standards

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