This practice is intended for use in reporting the experimental and data reduction procedures described in other publications.

1. Scope

1.1 This practice provides the minimum information necessary to describe the instrumental, experimental, and data reduction procedures used in acquiring and reporting secondary ion mass spectrometry (SIMS) mass spectral data.

This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use.

2. Referenced Documents (purchase separately) The documents listed below are referenced within the subject standard but are not provided as part of the standard.

ASTM Standards

E673 Terminology Relating to Surface Analysis

Keywords

mass spectral data; SIMS;

ICS Code

ICS Number Code 71.040.50 (Physicochemical methods of analysis)

Citing ASTM Standards

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