Significance and Use
The analyst may use this document to obtain information on the properties of electron spectrometers and instrumental aspects associated with quantitative surface analysis.
1.1 The purpose of this guide is to familiarize the analyst with some of the relevant literature describing the physical properties of modern electrostatic electron spectrometers.
1.2 This guide is intended to apply to electron spectrometers generally used in Auger electron spectroscopy (AES) and X-ray photoelectron spectroscopy (XPS).
1.3 The values stated in inch-pound units are to be regarded as standard. No other units of measurement are included in this standard.
1.4 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use.
2. Referenced Documents (purchase separately) The documents listed below are referenced within the subject standard but are not provided as part of the standard.
ISO 24237 Surface Chemical Analysis--X-Ray Photoelectron Spectroscopy--Repeatability and Constancy of Intensity Scale
E673 Terminology Relating to Surface Analysis
E902 Practice for Checking the Operating Characteristics of X-Ray Photoelectron Spectrometers
E1217 Practice for Determination of the Specimen Area Contributing to the Detected Signal in Auger Electron Spectrometers and Some X-Ray Photoelectron Spectrometers
E2108 Practice for Calibration of the Electron Binding-Energy Scale of an X-Ray Photoelectron Spectrometer
Auger electron spectroscopy; detectors; electron spectrometers; electrostatic analyzers; lens systems; X-ray photoelectron spectroscopy;
ICS Number Code 17.220.20 (Measurement of electrical and magnetic quantities)
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Citing ASTM Standards
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