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ASTM D5127 - 13


ASTM D5127 - 13 Standard Guide for Ultra-Pure Water Used in the Electronics and Semiconductor Industries


Active Standard ASTM D5127 Developed by Subcommittee: D19.02 |Book of Standards Volume: 11.01

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ASTM D5127

Significance and Use

4.1 This guide recommends the water quality required for the electronics and microelectronics industries. High-purity water is required to prevent contamination of products during manufacture, since contamination can lead to an unacceptable, low yield of electronic devices.

4.2 The range of water purity is defined in accordance with the manufacturing process. The types of ultra-pure water are defined with respect to device line width. In all cases, the water-quality recommendations apply at the point of distribution.

4.3 The limits on the impurities are related to current contamination specifications and to available analytical methods (either performed in a suitable clean laboratory or by on-line instrumentation). On-line and off-line methods are used in accordance with current industry practice. Concentration of the sample may be required to measure the impurities at the levels indicated in Table 1.

TABLE 1 Requirements for Water at the Point of Distribution in the Electronics and Semiconductor IndustriesA

Parameter

Type E-1

Type E-1.1

Type E-1.2B

Type E-1.3B

Type E-2

Type E-3

Type E-4

Linewidth (microns)

1.0–0.5

0.35–0.25

0.18–0.09

0.065–0.032

5.0–1.0

>5.0

—

Resistivity, 25°C (On-line)

18.1

18.2

18.2

18.2

16.5

12

0.5

TOC (μg/L) (on-line for <10 ppb)

5

2

1

1

50

300

1000

On-line dissolved oxygen (μg/L)

25

10

3

10

—

—

—

On-Line Residue after evaporation (μg/L)

1

0.5

0.1

 

—

—

—

On-line particles/L (micron range)

 

 

 

 

 

 

 

>0.05 μm

 

 

 

500

 

 

 

 0.05–0.1

 

1000

200

N/A

—

—

—

 0.1–0.2

1000

350

<100

N/A

—

—

—

  0.2–0.5

500

<100

<10

N/A

—

—

—

 0.5-1.0

200

<50

<5

N/A

—

—

—

 1.0

<100

<20

<1

N/A

—

—

—

SEM particles/L (micron range)

 

 

 

 

 

 

 

 0.1–0.2

1000

700

<250

N/A

—

—

—

 0.2–0.5

500

400

<100

N/A

3000

—

—

 0.5–1

100

50

<30

N/A

—

10 000

—

 10

<50

<30

<10

N/A

—

—

100 000

Bacteria in CFU/Volume

 

 

 

 

 

 

 

 100 mL Sample

5

3

1

N/A

10

50

100

 1 L Sample

 

 

10

1

 

 

 

10 L Sample

 

 

 

1

 

 

 

Silica – total (μg/L)

5

3

1

0.5

10

50

1000

Silica – dissolved (μg/L)

3

1

0.5

0.5

—

—

—

Anions and Ammonium by IC (μg/L)

 

 

 

 

 

 

 

 Ammonium

0.1

0.10

0.05

0.050

—

—

—

 Bromide

0.1

0.05

0.02

0.050

—

—

—

 Chloride

0.1

0.05

0.02

0.050

1

10

1000

 Fluoride

0.1

0.05

0.03

0.050

—

—

—

 Nitrate

0.1

0.05

0.02

0.050

1

5

500

 Nitrite

0.1

0.05

0.02

0.050

—

—

—

 Phosphate

0.1

0.05

0.02

0.050

1

5

500

 Sulfate

0.1

0.05

0.02

0.050

1

5

500

Metals by ICP/MS (μg/L)

 

 

 

 

 

 

 

 Aluminum

0.05

0.02

0.005

0.001

—

—

—

Antimony

 

 

 

0.001

 

 

 

Arsenic

 

 

 

0.001

 

 

 

 Barium

0.05

0.02

0.001

0.001

—

—

—

 BoronC

0.3

0.1

0.05

0.050

—

—

—

Cadmium

 

 

 

0.010

 

 

 

 Calcium

0.05

0.02

0.002

0.001

—

—

—

 Chromium

0.05

0.02

0.002

0.001

—

—

—

 Copper

0.05

0.02

0.002

0.001

1

2

500

 Iron

1.1 This guide provides recommendations for water quality related to electronics and semiconductor-industry manufacturing. Seven classifications of water are described, including water for line widths as low as 0.032 micron. In all cases, the recommendations are for water at the point of distribution (POD).

1.2 Water is used for washing and rinsing of semiconductor components during manufacture. Water is also used for cleaning and etching operations, making steam for oxidation of silicon surfaces, preparing photomasks, and depositing luminescent materials. Other applications are in the development and fabrication of solid-state devices, thin-film devices, communication lasers, light-emitting diodes, photo-detectors, printed circuits, memory devices, vacuum-tube devices, or electrolytic devices.

1.3 Users needing water qualities different from those described here should consult other water standards, such as Specification D1193 and Guide D5196.

1.4 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use.


2. Referenced Documents (purchase separately) The documents listed below are referenced within the subject standard but are not provided as part of the standard.

ASTM Standards

D1129 Terminology Relating to Water

D1193 Specification for Reagent Water

D1976 Test Method for Elements in Water by Inductively-Coupled Argon Plasma Atomic Emission Spectroscopy

D2791 Test Method for On-line Determination of Sodium in Water

D3919 Practice for Measuring Trace Elements in Water by Graphite Furnace Atomic Absorption Spectrophotometry

D4191 Test Method for Sodium in Water by Atomic Absorption Spectrophotometry

D4192 Test Method for Potassium in Water by Atomic Absorption Spectrophotometry

D4327 Test Method for Anions in Water by Suppressed Ion Chromatography

D4453 Practice for Handling of High Purity Water Samples

D4517 Test Method for Low-Level Total Silica in High-Purity Water by Flameless Atomic Absorption Spectroscopy

D5173 Test Method for On-Line Monitoring of Carbon Compounds in Water by Chemical Oxidation, by UV Light Oxidation, by Both, or by High Temperature Combustion Followed by Gas Phase NDIR or by Electrolytic Conductivity

D5196 Guide for Bio-Applications Grade Water

D5391 Test Method for Electrical Conductivity and Resistivity of a Flowing High Purity Water Sample

D5462 Test Method for On-Line Measurement of Low-Level Dissolved Oxygen in Water

D5542 Test Methods for Trace Anions in High Purity Water by Ion Chromatography

D5544 Test Method for On-Line Measurement of Residue After Evaporation of High-Purity Water

D5673 Test Method for Elements in Water by Inductively Coupled Plasma--Mass Spectrometry

D5996 Test Method for Measuring Anionic Contaminants in High-Purity Water by On-Line Ion Chromatography

D5997 Test Method for On-Line Monitoring of Total Carbon, Inorganic Carbon in Water by Ultraviolet, Persulfate Oxidation, and Membrane Conductivity Detection

F1094 Test Methods for Microbiological Monitoring of Water Used for Processing Electron and Microelectronic Devices by Direct Pressure Tap Sampling Valve and by the Presterilized Plastic Bag Method


Keywords

electronic; microelectronics; semiconductor; ultra-pure water;


ICS Code

ICS Number Code 13.060.25 (Water for industrial use); 71.100.99 (Other products of the chemical industry)


DOI: 10.1520/D5127-13

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