Mechanical Properties of Structural Films

    Muhlstein CL, Brown SB
    Published: 2001

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    Written by an international group of experts from six countries.

    STP 1413 is one of the most complete assemblies of papers on the characterization of the mechanical properties of structural films available to date. In the rapidly developing field of structural films, this new ASTM publication is a milestone in the engineering of these materials systems and their characterization.

    22 papers cover four major areas of structural films characterization:

    • Fracture and Fatigue

    • Elastic Behavior and Residual Stress

    • Tensile Testing

    • Thermomechanical, Wear, and Radiation Damage

    Table of Contents

    Surface Topology and Fatigue in Si MEMS Structures
    Allameh S., Brown S., Gally B., Soboyejo W.

    Cross Comparison of Direct Strength Testing Techniques on Polysilicon Films
    Chasiotis I., Coles G., Knauss W., LaVan D., Read D., Tsuchiya T.

    Fatigue and Fracture in Membranes for MEMS Power Generation
    Bahr D., Crozier B., Richards C., Richards R.

    Effects of Microstructure on the Strength and Fracture Toughness of Polysilicon: A Wafer Level Testing Approach
    Ballarini R., Heuer A., Kahn H., Tayebi N.

    Fatigue Crack Growth of a Ni-P Amorphous Alloy Thin Film
    Higo Y., Shimojo M., Swain M., Takashima K.

    Direct Tension and Fracture Toughness Testing Using the Lateral Force Capabilities of a Nanomechanical Test System
    Buchheit T., Friedmann T., Glass S., Jackson K., LaVan D., McKenzie B., Sullivan J.

    Fracture Behavior of Micro-Sized Specimens with Fatigue Pre-Crack Prepared from a Ni-P Amorphous Alloy Thin Film
    Higo Y., Shimojo M., Swain M., Takashima K.

    Integrated Platform for Testing MEMS Mechanical Properties at the Wafer Scale by the IMaP Methodology
    de Boer M., Masters N., Pryputniewicz E., Sinclair M., Smith N.

    Influence of the Film Thickness on Texture, Residual Stresses and Cracking Behavior of PVD Tungsten Coatings Deposited on a Ductile Substrate
    Crépin J., Farges G., Ganne T., Pradeilles-Duval R., Zaoui A.

    High Accuracy Measurement of Elastic Constants of Thin Films by Surface Brillouin Scattering
    Beghi M., Bottani C., Pastorelli R.

    Effect of Nitrogen Feedgas Addition on the Mechanical Properties of Nano-Structured Carbon Coatings
    Catledge S., Vohra Y.

    Characterization of the Young's Modulus of CMOS Thin Films
    Hossain N., Ju J., Pister K., Warneke B.

    Derivation of Elastic Properties of Thin Films from Measured Acoustic Velocities
    Beghi M., Bottani C., Pastorelli R., Saltelli A., Tarantola S.

    Side-by-Side Comparison of Passive MEMS Strain Test Structures under Residual Compression
    Baker M., de Boer M., Jensen B., Koester D., Masters N.

    Mechanical Tests of Free-Standing Aluminum Microbeams for MEMS Application
    Bravman J., Lee H., Zhang P.

    Tensile Testing of Thin Films Using Electrostatic Force Grip
    Sakata J., Tsuchiya T.

    Tensile Tests of Various Thin Films
    Coles G., Eby M., Edwards R., Jackson K., Sharpe W.

    Ductile Thin Foils of Ni3Al
    Demura M., George E., Hirano T., Kishida K., Umezawa O.

    Microstructural and Mechanical Characterization of Electrodeposited Gold Films4
    Crago K., Long G., McColskey J., Read D.

    Determining the Strength of Brittle Thin Films for MEMS
    Honda T., Johnson G., Jones P., Wu M.

    Thermomechanical Characterization of Nickel-Titanium Copper Shape Memory Alloy Films
    Krulevitch P., Ramsey P., Seward K.

    Deformation and Stability of Gold/Polysilicon Layered MEMS Plate Structures Subjected to Thermal Loading
    Bright V., Dunn M., Zhang Y.

    The Effects of Radiation on the Mechanical Properties of Polysilicon and Polydiamond Thin Films
    Davidson J., Newton R.

    Author Index

    Subject Index

    Committee: E08

    DOI: 10.1520/STP1413-EB

    ISBN-EB: 978-0-8031-5458-2

    ISBN-13: 978-0-8031-2889-7

    ASTM International is a member of CrossRef.