Gate Dielectric Integrity: Material, Process, and Tool Qualification

    Gupta DC, Brown GA

    Pages: 169

    Published: 2000

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    Thirteen papers provide the latest concepts and metrology of the Gate Dielectric Integrity (GDI) and its applications for the material and device process and tool qualification. The wide variety of topics covered includes: concepts, methods, protocols and reliability, and assessment as related to dielectric integrity. The characterization of thin dielectrics, various GDI measurements techniques, and discussion of important effects on the characterization of GDI is also included. Until now, such information has never been available in a single book on GDI.

    This publication will benefit process engineers, fab technologists, quality and reliability engineers, silicon material scientists, materials characterization analysts, research scholars and device engineers.

    Committee: F01

    Paper ID: STP1382-EB

    DOI: 10.1520/STP1382-EB

    ISBN-EB: 978-0-8031-5431-5

    ISBN-PRINT: 978-0-8031-2615-2

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