SYMPOSIA PAPER Published: 01 January 1974
STP47410S

Evaluation of the Effective Epilayer Thickness by Spreading Resistance Measurement

Source

Two types of double layer structure which are dealt with in the multi layer theory have been examined: 1. a top layer is insulated against a bottom layer (i.e. pn-junction, R(∞)). 2. a top layer is shorted by a bottom layer (i.e. n+-buried layer, R(0)). In both arrangements the Spreading Resistance depends strongly on layer thickness d and on the radius a of contact area. Knowing the effective radius the epilayer thickness can easily be evaluated from Spreading Resistance Measurement and making use of the function R()R(0)=f(da). This method is nondestructive and less rime consuming than other common methods. A simple test pattern is proposed for evaluating the thickness on wafers in process. A comparison between this method and an IR-reflexion method (Digilab FTG 12) showed that both are in very good agreement in thickness range of 2.....6μm.

Author Information

Murrmann, H.
Sedlak, F.
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Details
Developed by Committee: F01
Pages: 217–221
DOI: 10.1520/STP47410S
ISBN-EB: 978-0-8031-6938-8
ISBN-13: 978-0-8031-6661-5