SEDL / STP / STP572-EB / STP47402S

On the Calibration and Performance of a Spreading Resistance Probe

Ruiz, H. J.
Texas Instruments Incorporated, Dallas, Texas

Voltmer, F. W.
Texas Instruments Incorporated, Dallas, Texas

Pages: 10    Published: Jan 1974

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Abstract

In this paper, techniques are presented for material standards selection for calibration purposes, materials and calibration block preparation, and techniques for data collection and processing for the spreading resistance probe. A description of the variation with time of the calibration of a spreading resistance probe is presented. Problems encountered with characterization of high resistivity p-type silicon are discussed, and examples of the probe performance in the characterization of germanium are also presented.