STP572: On the Calibration and Performance of a Spreading Resistance Probe

    Ruiz, H. J.
    Texas Instruments Incorporated, Dallas, Texas

    Voltmer, F. W.
    Texas Instruments Incorporated, Dallas, Texas

    Pages: 10    Published: Jan 1974


    In this paper, techniques are presented for material standards selection for calibration purposes, materials and calibration block preparation, and techniques for data collection and processing for the spreading resistance probe. A description of the variation with time of the calibration of a spreading resistance probe is presented. Problems encountered with characterization of high resistivity p-type silicon are discussed, and examples of the probe performance in the characterization of germanium are also presented.


    Automated resistivity measurements, calibration, germanium characterization, sample preparation, silicon characterization, spreading resistance, surface effects

    Paper ID: STP47402S

    Committee/Subcommittee: F01.15

    DOI: 10.1520/STP47402S

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