White, James C.
Western Electric Co., Inc., Allentown, Pa.
Pages: 4 Published: Jan 1974
An automated spreading resistance test facility has been designed and constructed at the Allentown Works of the Western Electric Co. This system has been shown to provide a rapid, semi-nondestructive, and reproducible measurement of epitaxial layer resistivity which can be used in a production environment. The system has the advantages of operator independence, well protected probes, and four-inch capability. Surface or in-depth measurements can be performed with on-line calculations of resistivity and impurity concentration. Cycle time is less than five seconds per measurement and system reproducibility is ± 1.3% (lS).
Automated testing, epitaxial silicon, impurity concentration, resistivity, semiconductor materials, silicon, spreading resistance
Paper ID: STP47397S