Morris, B. L.
Bell Telephone Laboratories, Incorporated, Allentown, Pennsylvania
Langer, P. H.
White, J. C.
Western Electric Company, Allentown, Pennsylvania
Pages: 12 Published: Jan 1974
The spreading resistance technique is an excellent method of measuring epitaxial resistivity profiles. In many cases it is the only method by which the complete profile may be measured. However, thin film correction factors must be used to convert the spreading resistance into a corrected resistivity. Previous calculations of these correction factors have emphasized a mathematically complex solution which necessitates the use of a large computer. The correction factors used here are calculated from a relatively simple algorithm which allows the use of a minicomputer. A documented program is presented which uses these algorithms. This program, written in FOCAL for use on the PDP8 series of minicomputers, is fast, accurate, easy to use, and provides a complete data reduction system. Examples of corrected spreading resistance profiles are presented, and compared with independent results such as diode C-V and four point probe measurements.
Resistivity profiles, spreading resistance, thin film correction factors
Paper ID: STP47395S