Two Point Probe Correction Factors

SEDL / STP / STP572-EB / STP47393S

Two-Point Probe Correction Factors

Dickey, D. H.
Bell and Howell Research Laboratory, Pasadena, California

Pages: 6 Published: Jan 1974

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Abstract

The effects of sample boundaries on resistivity measurements made with a two-point spreading resistance probe are calculated for various boundary conditions. The results are presented in the form of dimensionless correction factors. The problem of depth-dependent resistivity in a thin layer is considered, and a method for correcting measurements on such layers is described.

Keywords:
Boundary correction, calculations, electrostatic analogue, resistivity, semiconductor, spreading resistance

Paper ID: STP47393S
Committee/Subcommittee: F01.15
DOI: 10.1520/STP47393S

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