Published: Jan 1974
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Good morning. On behalf of ASTM Committee F-l, the other sponsor of this meeting, I want to welcome you all. Spreading resistance measurements are only one of many measurement techniques with which Committee F-l is concerned. To give some perspective, let me describe a little of ASTM's background in electronics for you. ASTM is a large association of professional people who are engaged in developing standards on subjects ranging from railroad rails to surgical implants, and electronics is just one of over 120 such topics. Committee F-l was established in 1955, developing out of work on electron tube materials which had previously been in a committee on copper. One of our major efforts has been in the development of ways to measure the properties of semiconductor silicon. As Judson French has mentioned, NBS and ASTM have collaborated closely in this work, especially in resistivity measurements. Fifteen years ago we were lucky if two different people could measure the resistivity of a piece of silicon to within a factor of two, but now with the use of ASTM'methods it is possible to do this measurement to an accuracy of a couple of percent. Similar progress could be cited for many other measurements essential to good process control in our industry.
Scace, Robert I.
General Electric Company, Syracuse, New York
Paper ID: STP47389S